The monitoring capabilities for the production of optical multilayer coatings in batch type coating systems have significantly improved in the last 20 years. Substantial progress was achieved by introduction of direct intermittent monitoring on the rotating substrate holder. Both, monochromatic and broadband monitoring systems are successfully used for thickness control in production.
In 2006 the OMS 5000 series, a high-resolution monochromatic monitoring system was introduced in the market. It is well established and widely applied in the optical coating industry. The new generation OMS 5100 is used in evaporation, magnetron and ion beam sputtering systems with various chamber sizes and different types of substrate holders. The main features of the system and some outstanding applications will be presented.
Bühler Leybold Optics WBM-1000, a wideband optical monitoring system based on a fast triggered spectrometer with a highly dynamic array detector with low signal noise will be presented. While using the same optical feed-throughs in the chamber as the OMS5100, its fast in-situ transmittance measurement capabilities allow for optical thickness control on the rotating substrate holder during deposition.
TOMS, our newly developed software platform for optical monitoring systems communicates with the WBM-1000. TOMS supports many different strategies for film thickness control based on broadband monitoring (merit function) and monochromatic run sheets, fully supporting the well proven cut-off strategies (turning point monitoring, trigger-point cut-off) of the OMS 5100. Further features include Reverse Engineering based on measured spectra, pre-production analysis and simulation, design import (Optilayer, LMR, LPR) and OMS 5100 simulation.
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Detlef Arhilger studied Applied Physics at the polytechnic in Jülich (Germany) and the University of Coventry (England) and received his Diploma in 1989.
He joined the Leybold AG in 1991 as a process engineer, responsible for the comissioning of PVD coaters at customers in the opthalmic and precision optics business.
Since 2013 Detlef is working in the Optics R&D team at Bühler Leybold Optics, focusing on the process development of precision optics applications with an emphasis on thin film design (Optilayer, MCalc) and optical monitoring (OMS5100, WB-OMS). As project manager he is driving the development of a new thin film optical monitoring software (TOMS), as the universal tool for broadband- and monochromatic monitoring.
Alfons Zoeller received his Diploma in Electrical Engineering in 1973 from the University of Applied Science, Frankfurt, Main (Germany). In 1976 he joined the Leybold Group, and spent 13 years engaged in the development of optical monitors and automatic control systems. Furthermore, he was responsible for the development of the APS Plasma Source and plasma ion assisted coating processes, including precision optics and ophthalmic applications. From 2000 to 2002 he was Plant Manager and Managing Director of Corning NetOptix’s German operation. In this position, he drove a start up facility for development and production of DWDM thin film filters for fibre optic applications. In 2003 he re-joined Leybold Optics as Manager of R&D, and is responsible for R&D of coating equipment and processes for precision optics applications focusing on optical monitoring.
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