In 2006 the OMS 5000 series, a high-resolution monochromatic monitoring system was introduced in the market. It is well established and widely applied in the optical coating industry. The new generation OMS 5100 is used in evaporation, magnetron and ion beam sputtering systems with various chamber sizes and different types of substrate holders. The main features of the system and some outstanding applications will be presented.
Bühler Leybold Optics WBM-1000, a wideband optical monitoring system based on a fast triggered spectrometer with a highly dynamic array detector with low signal noise will be presented. While using the same optical feed-throughs in the chamber as the OMS5100, its fast in-situ transmittance measurement capabilities allow for optical thickness control on the rotating substrate holder during deposition.
TOMS, our newly developed software platform for optical monitoring systems communicates with the WBM-1000. TOMS supports many different strategies for film thickness control based on broadband monitoring (merit function) and monochromatic run sheets, fully supporting the well proven cut-off strategies (turning point monitoring, trigger-point cut-off) of the OMS 5100. Further features include Reverse Engineering based on measured spectra, pre-production analysis and simulation, design import (Optilayer, LMR, LPR) and OMS 5100 simulation.