We present our recent advancement in the development of Ion Beam Figuring (IBF) equipment. IBF is an alternative way to correct shape errors of optical surfaces, super-smooth the surface or modify the shape of optical reflective or refractive elements in a deterministic way. For high precision surfaces traditional polishing and error correcting methods, such as MRF come to their limits due to the fact that a physical contact between the tool and the surface is needed. With IBF at the contrary there is no physical contact, it is a pure beam–surface interaction and no additional errors or subsurface damages were created. We present results of IBF processes and show how we can make the IBF most economical in the sense of shortening the process time. The obtained high precision, smooth surfaces are very suitable to be coated using our IBS technology for very dense, extremely high reflective, high damage threshold coatings. We present results on our current technological progress.
Part 1 (20min): Introduction to Leybold Optics IBF (Steffen Gürtler)
Part 2 (20min): IBF-Software and Process Results (Christian Kettmann)
Part 3 (20min): Questions