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Sputter coater for highly precise layers

HELIOS series

The Helios sputter coater from Bühler is designed to meet the highest demands for thin-film coatings. Use it for laser line, steep-edge and notch filters, laser and chirped mirrors, polarizers, beam splitters, bio and ADAS sensors or consumer electronics.

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Key benefits

Setting new performance standards

Due to optimal film oxidation, high layer densities and low layer losses, HELIOS achieves maximum laser damage threshold values, low scattering and high reflectivity. This sets new benchmarks for filters with over 200 layers or layers up to 20 µm thick.

Setting the benchmark for on-substrate in-situ optical monitoring

Excellent process stability results in extremely high production stability and unrivalled repeatability. HELIOS tools are well known for their thickness precision down to ultra-thin layers.

Innovative PARMS technology

Plasma-assisted reactive magnetron-sputtering (PARMS) process technology ensures precise control of very thin layers at atomic scale, bringing you top grade products and high yield.

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PARMS technology

Highly precise films​

State of the art PARMS (Plasma-Assisted Reactive Magnetron-Sputtering) technology allows the deposition of dielectric coatings from metal targets with high- and low-refractive indices by combining mid-frequency (MF) and radio-frequency (RF) sputter technologies via two magnetrons. This allows you to enjoy high productivity for top grade products, with the ultimate precision at atomic scale.

On-substrate optical monitoring

Achieving highest reproducibility; safeguard your production.

Our renowned in-situ optical monitoring system LEYBOLD OPTICS OMS 5100 ensures the precise termination of the deposition process of each layer. For larger layer stacks and when using the automated loading system, test glasses can be exchanged without the vacuum being broken. This means HELIOS tools allow for long hours of unattended operation without compromising the quality of your product.

You can quickly transfer optical designs in LMR and LPR file format into the production tool. The coaters perfectly match production in a wide range of filter designs. This helps to rapidly prototype new products and cut time-to-market.

Co-sputtering produces any refractive index, which can in theory be achieved with high- and low-index sputtering materials. This improves the flexibility of the tools and can rapidly prototype or increase daily production throughput.

Customize your Helios vacuum coater to match what you need for your product, process, and production.

Key topics

Billions of people come into contact with Bühler technologies to cover their basic needs for food and mobility every day. Our motto is creating “innovations for a better world.” Find out more about our key topics.

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