SYRUSpro seriesDifferent chamber sizes for maximum flexibility
SYRUSpro coaters are available in eight different chamber sizes with inner diameters of between 710 mm and 2810 mm. This means we can offer a corresponding chamber to perfectly match the loading capacities and substrate sizes defined by our customers. As an example, our 1950-mm or 2810-mm chambers are ideal platforms for extreme substrate sizes.
Broad range of components for a variety of processes
- The extensive use of key components proprietarily designed and manufactured by Bühler Leybold Optics’ provides the basis for the large variety of highly reliable processes available to our customers and plays a major role in their success.
- The broad diversity within the Bühler Leybold Optics components portfolio means that SYRUSpro coaters are highly flexible when it comes to tailoring systems to customers’ requirements. The range features systems such as the LEYBOLD OPTICS OMS 5100 in-situ optical monitoring system and the plasma sources LEYBOLD OPTICS LION 300 and LEYBOLD OPTICS APSpro. A large selection of electron-beam evaporators, thermal evaporators, quartz-crystal measurement systems and planetary rotation systems further enhance the adaptability of the SYRUSpro series.
System can be optimized for DUV applications
Bühler Leybold Optics has developed optimized system solutions for photolithography applications at the 193 nm wavelength. These solutions include specially treated chamber surfaces, selected materials and individualized component configurations to ensure extremely low losses for the coatings. These measures are also essential in the application of oxide coatings creating shift-free and stable mirror coatings with the high reflectivity values that are required on DUV applications.
Availability of systems for IR applications
To meet the special requirements of IR applications the machine’s design can be perfectly adapted and its components matched to handle the high amounts of IR coating materials. Flat and strongly curved substrates in need of good uniformity can be coated with excellent layer performance over the complete surface and curvature.