SYRUSpro series of precision optics vacuum coaters

SYRUSpro series of precision optics vacuum coaters –The benchmark for a 24/7 volume production of optical filters

- Chambers for all loading capacity requirements
- Key components to match individual demands
- Adaptable for DUV and IR applications

SYRUSpro series

The SYRUSpro series by Bühler Leybold Optics is an industry leading platform in volume production with high accuracy and high yield levels of optical coatings for precision optics. SYRUSpro coaters are ideal for applications from deep ultraviolet (DUV) via visible spectrum (VIS) up to infrared (IR) spectral range. The variety of coatings covers edge filters (short and long pass), UV–IR cut filters, notch filters and narrow band-pass filters, dichroic color filters and polarization beam splitters, AR and HR coatings for lasers and many more. Every SYRUSpro is equipped to the customer’s requirements with a large number of Bühler Leybold Optics proprietary and standardized components. This allows simple updating to match increasing process requirements. In addition, Bühler Leybold Optics’ cutting-edge process control system unites high programming flexibility with maximum levels of automation. All of these attributes combine to deliver very precise, high yield and high throughput figures for the uninterrupted 24/7 volume production of optical filters. Different chamber sizes for maximum flexibility
SYRUSpro coaters are available in eight different chamber sizes with inner diameters of between 710 mm and 2810 mm. This means we can offer a corresponding chamber to perfectly match the loading capacities and substrate sizes defined by our customers. As an example, our 1950-mm or 2810-mm chambers are ideal platforms for extreme substrate sizes.

Broad range of components for a variety of processes

  • The extensive use of key components proprietarily designed and manufactured by Bühler Leybold Optics’ provides the basis for the large variety of highly reliable processes available to our customers and plays a major role in their success. 
  • The broad diversity within the Bühler Leybold Optics components portfolio means that SYRUSpro coaters are highly flexible when it comes to tailoring systems to customers’ requirements. The range features systems such as the LEYBOLD OPTICS OMS 5100 in-situ optical monitoring system and the plasma sources LEYBOLD OPTICS LION 300 and LEYBOLD OPTICS APSpro. A large selection of electron-beam evaporators, thermal evaporators, quartz-crystal measurement systems and planetary rotation systems further enhance the adaptability of the SYRUSpro series.

System can be optimized for DUV applications
Bühler Leybold Optics has developed optimized system solutions for photolithography applications at the 193 nm wavelength. These solutions include specially treated chamber surfaces, selected materials and individualized component configurations to ensure extremely low losses for the coatings. These measures are also essential in the application of oxide coatings creating shift-free and stable mirror coatings with the high reflectivity values that are required on DUV applications.

Availability of systems for IR applications
To meet the special requirements of IR applications the machine’s design can be perfectly adapted and its components matched to handle the high amounts of IR coating materials. Flat and strongly curved substrates in need of good uniformity can be coated with excellent layer performance over the complete surface and curvature.