The SYRUSpro delivers unsurpassed performance and productivity for your 24/7 optical filter volume production. From deep ultraviolet (DUV) to visible spectrum (VIS) and infrared (IR) spectral range, this is your benchmark solution.
SYRUSpro coaters are available in eight different chamber sizes with inner diameters of between 710 mm and 2800 mm. This allows you to choose a chamber to perfectly match the loading capacities and substrate sizes defined by your process.
The variety of coatings covered by the SYRUSpro series includes edge filters (short or long pass), UV and IR cut filters, notch filters and narrow bandpass filters, dichroic color filters and polarization beam splitters, AR and HR coatings for lasers and many more.
A vast range of proprietary components allows us to tailor systems to your product requirements. We can help you to choose from in-situ optical monitoring, plasma sources and a large selection of electron-beam evaporators, thermal evaporators, quartz crystal measurement and substrate holder systems to meet your needs.
Automation
Our cutting-edge process control system unites high programming flexibility with maximum levels of automation, giving you the control you need to drive up efficiency in 24/7 production cycles.
Optimized system solutions
Optimized system solutions for photolithography applications at the 193 nm wavelength include specially treated chamber surfaces, selected materials and individualized component configurations to ensure extremely low losses for these coatings. These measures also create shift-free and stable mirror coatings with the high reflectivity values required on your DUV applications.
IR applications
To meet the special requirements of your infrared (IR) applications, the machine can be perfectly adapted to handle the high amounts of IR coating materials. Flat and strongly curved substrates in need of good uniformity can be coated with excellent layer performance over the complete surface and curvature.
Customizable
Our vastly experienced Bühler Leybold Optics team will work with you to help specify the precise configuration you need to create the highest quality, most efficient and reliable vacuum coating solution for your application.
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