The Leybold Optics LTE series is the long throw evaporation solution for designing structured features with nanometer scales to couple with the lift-off process and especially engineered for semiconductor applications and R&D.
Experience cutting-edge evaporation technology with our uniquely designed system featuring a source-to-dome distance of 1.3 meters, allowing for long throw evaporation. Our adaptable dome precisely caters up to 6x 150 mm diameter substrates with an option for 200 mm capacity upon request, ensuring versatility and superior coverage for your high-precision manufacturing needs.
Uniting an electron-beam gun with a plasma source, our advanced process innovation for Plasma-Impulse Atomic Deposition (PIAD) improves thin-film quality and adhesion. This combination results in precise thickness control and expanded material capabilities.
Our designed deposition system introduces a state-of-the-art dome constructed to achieve nearly perpendicular deposition angles, ensuring directional coatings of the highest precision. This innovative approach provides unparalleled uniformity and quality in thin-film applications, setting a new standard for accuracy and performance in the industry.
Our training and services are designed to keep you up to date on our products and technologies, giving you the confidence and experience you need.
Sales Manager Semiconductor
daniel.sa_pereira@buhlergroup.com
+49 6023 500 0
Siemensstrasse 88
Alzenau, Germany
63755
