This webinar highlights our industry-proven LEYBOLD OPTICS HELIOS series for fast, precise and fully-automated thin-film deposition. The HELIOS sputtering system provides extremely accurate layer deposition and thickness control, allowing manufacture of state of the art optical components with high throughput.
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Details
Reactive magnetron sputtering with MF (mid frequency) is a well-established deposition technique for different kinds of layers and structures. In particular high quality optical filters with low loss and high performance can be deposited by using the PARMS and PARMS+ technology. This technology provides greater repeatability and highest optical performance.
Current and upcoming specifications for optical filters and components are driving the demand for optimized deposition techniques. Besides the need for high precision process control to achieve accurate and reproducible layer properties, additional requirements from a process automation perspective have to be considered.
The HELIOS sputtering system provides extremely accurate layer deposition and thickness control, allowing manufacture of state of the art optical components with high throughput. These include beam splitters, band pass, edge, and multi notch dielectric filters. In addition optoelectronic applications, which combine electronic components with optical filters, are growing rapidly.
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Speakers
Dr. Harro Hagedorn
Head of Process Development & Application
Harro Hagedorn studied physics and received his PhD from the University of Hamburg (Germany) in 1995. The focus on his research was on ion assisted deposition of laser coatings.
He joined the Leybold AG as a R&D project manager and worked for 6 years in developing new deposition technology for ophthalmic and precision optics. From 2001 he is leading the development group for optical coating technology.
As Head of the Optics R&D team at Bühler Leybold Optics, he is responsible for the application lab and the process development.
Dr. Jens-Peter Biethan
Project Manager - Process Development & Application
Jens-Peter Biethan studied electrical engineering and received his PhD from the Technical University of Darmstadt (Germany) in 2013. He focused his research on deposition and applications of semiconductors for high frequency devices and sensors. Joining the microelectronic industry he worked several years on the epitaxial growth related to state of the art 28 nm CMOS technology development.
As part of the Optics R&D team at Bühler Leybold Optics, Jens is working in the R&D department focusing on sputtering and applications for precision optics. In his current role as project manager he is driving new technology and process development with a special emphasis to the HELIOS platform.
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