This upgrade gives you the option to include all Leybold Optics ion sources, high-voltage power supplies and updated EBG in your Leycom IV machine.
This upgrade gives you the option to include all Leybold Optics ion sources, high-voltage power supplies and updated EBG in your Leycom IV machine.
Syrus LC IV upgrade is a compatible upgrade for all LEYCOM IV machines, which can include Mark II ion source, new high voltage power supply and updated EBG.
Options
We can insert a new Mark II ion source, modify the cold trap or insert a flip over, or include a full calotte substrate holder.
Energy saving
The ECO mode can save you energy on your diffusion pump, the PFC, your cold trap, your warm water unit and your root pump.
Vacuum options
We can modify the vacuum measuring or pre-vacuum system and insert isolation for a high vacuum pump if relevant for your process.
Substrate holder options
You can choose between a flip over or full calotte substrate holder. The throughput is between 36 and 58 lenses, depending on your substrate diameter.
Modular design
Programmable in a range of evaporation patterns for a variety of layer material with EGC 38. Connections at atmosphere through singles flange DN100.
Gupfenstrasse 5
Uzwil
9240
Switzerland
