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Precision optics vacuum coater

SYRUSpro series

The SYRUSpro delivers unsurpassed performance and productivity for your 24/7 optical filter volume production. From deep ultraviolet (DUV) to visible spectrum (VIS) and infrared (IR) spectral range, this is your benchmark solution.

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Key benefits

Designed for tough applications

The SYRUSpro is designed to meet your most challenging specifications for IR, DUV and even extreme wavelength regimes.

Matched to your process

A broad range of high-quality key components allows us to configure the SYRUSpro to match your precise process needs.

Maximum flexibility

You can choose from eight chamber sizes to perfectly match your loading capacities and substrate sizes.

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Chamber options

Matching your process needs

SYRUSpro coaters are available in eight different chamber sizes with inner diameters of between 710 mm and 2800 mm. This allows you to choose a chamber to perfectly match the loading capacities and substrate sizes defined by your process.

Coatings choice

Meeting your coating specifications

The variety of coatings covered by the SYRUSpro series includes edge filters (short or long pass), UV and IR cut filters, notch filters and narrow bandpass filters, dichroic color filters and polarization beam splitters, AR and HR coatings for lasers and many more.

Key component flexibility

Adapting to your product

A vast range of proprietary components allows us to tailor systems to your product requirements. We can help you to choose from in-situ optical monitoring, plasma sources and a large selection of electron-beam evaporators, thermal evaporators, quartz crystal measurement and substrate holder systems to meet your needs.

Our cutting-edge process control system unites high programming flexibility with maximum levels of automation, giving you the control you need to drive up efficiency in 24/7 production cycles.

Optimized system solutions for photolithography applications at the 193 nm wavelength include specially treated chamber surfaces, selected materials and individualized component configurations to ensure extremely low losses for these coatings. These measures also create shift-free and stable mirror coatings with the high reflectivity values required on your DUV applications.

To meet the special requirements of your infrared (IR) applications, the machine can be perfectly adapted to handle the high amounts of IR coating materials. Flat and strongly curved substrates in need of good uniformity can be coated with excellent layer performance over the complete surface and curvature.

Our vastly experienced Bühler Leybold Optics team will work with you to help specify the precise configuration you need to create the highest quality, most efficient and reliable vacuum coating solution for your application.

Key topics

Billions of people come into contact with Bühler technologies to cover their basic needs for food and mobility every day. Our motto is creating “innovations for a better world.” Find out more about our key topics.

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